The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Aug. 03, 2021
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Mykola Kaplenko, Brno, CZ;
Remco Schoenmakers, Eindhoven, NL;
Oleksii Kaplenko, Brno, CZ;
Ondrej Machek, Brno, CZ;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G05B 13/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); G05B 13/027 (2013.01); H01J 2237/282 (2013.01);
Abstract
The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.