The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Mar. 11, 2021
Inpria Corporation, Corvallis, OR (US);
Joseph B. Edson, Corvallis, OR (US);
Thomas J. Lamkin, Corvallis, OR (US);
William Earley, Corvallis, OR (US);
Truman Wambach, Portland, OR (US);
Jeremy T. Anderson, Corvallis, OR (US);
Inpria Corporation, Corvallis, OR (US);
Abstract
A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′)or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′)and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″), where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.