The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2024
Filed:
Jun. 26, 2017
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Maybelle Woo, Dedham, MA (US);
Jeffrey E. Townley, Lowell, MA (US);
Kwok-Shun Cheng, Nashua, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 69/08 (2006.01); B01D 69/02 (2006.01); B01D 63/02 (2006.01); B01D 61/14 (2006.01); B01D 67/00 (2006.01); B01D 71/56 (2006.01);
U.S. Cl.
CPC ...
B01D 69/08 (2013.01); B01D 61/14 (2013.01); B01D 63/02 (2013.01); B01D 67/0016 (2013.01); B01D 69/02 (2013.01); B01D 69/081 (2013.01); B01D 69/087 (2013.01); B01D 71/56 (2013.01); B01D 2325/20 (2013.01);
Abstract
Described herein is a polyamide hollow fiber membrane and methods of making and using the hollow fiber membrane. The polyamide hollow fiber membrane has an isopropanol permeability of from about 5 L/m2 h bar to about 150 L/m2 h bar and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm. The polyamide hollow fiber membranes described herein are particularly useful for photoresist filtration, for example.