The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2024

Filed:

Jun. 02, 2021
Applicant:

Silergy Semiconductor Technology (Hangzhou) Ltd, Hangzhou, CN;

Inventors:

Zheng Lv, Hangzhou, CN;

Xunyi Song, Hangzhou, CN;

Meng Wang, Hangzhou, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76877 (2013.01); H01L 21/76831 (2013.01); H01L 21/76832 (2013.01);
Abstract

A method of manufacturing a semiconductor device can include: forming an interlayer dielectric layer on an upper surface of a lower metal layer, the lower metal layer including first and second regions; forming a through hole extending from an upper surface of interlayer dielectric layer to the lower metal layer to expose the upper surface of the lower metal layer; forming a conductive layer covering a bottom part and sidewall parts of the through hole, and the upper surface of the interlayer dielectric layer; forming a first dielectric layer covering the first conductive layer on the first region of the lower metal layer; filling the through hole with a first metal; and forming an upper metal layer above the upper surface of the interlayer dielectric layer.


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