The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Apr. 21, 2020
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Bruce Tirri, Brookfield, CT (US);
Ping Zhou, Wilton, CT (US);
Elizabeth Mary Stone, Stamford, CT (US);
David Hart Peterson, Milford, CT (US);
Mehmet Ali Akbas, Cheshire, CT (US);
Ryan Mayer, Trumbull, CT (US);
Richard Bryan Lewis, Rye, NY (US);
Assignee:
ASML HOLDING N.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/687 (2006.01); C23C 16/513 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68735 (2013.01); C23C 16/513 (2013.01); G03F 7/707 (2013.01); G03F 7/70783 (2013.01); H01L 21/68757 (2013.01);
Abstract
A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.