The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Feb. 12, 2019
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
Tomas Polakovic, Chicago, IL (US);
Valentine Novosad, Lemont, IL (US);
Assignee:
UCHICAGO ARGONNE, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/46 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/46 (2013.01); C23C 14/0641 (2013.01); C23C 14/08 (2013.01); C23C 14/3407 (2013.01);
Abstract
A method of making a thin film can include bombarding a substrate with first ions supplied from a first ion beam; and sputtering from a metal sputtering target substantially simultaneously with the bombardment to deposit a metal-ion film onto the substrate, wherein the method is performed without applied heat, and the metal sputtering target comprises one or more of a metal, a transition metal, a semi-metal, alloys thereof and combinations thereof.