The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Oct. 18, 2021
International Business Machines Corporation, Armonk, NY (US);
Kathryn Jessica Pooley, Croton on Hudson, NY (US);
Hongwen Yan, Somers, NY (US);
Gerald W. Gibson, Danbury, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
Techniques and methods to form smooth metal layers deposited onto selected surfaces of Josephson junction devices are provided. For example, one or more embodiments described herein can comprise depositing a layer of a first material comprising metal atom species on a selected surface of a device layer; depositing a layer of a second material on a surface of the layer of first material; and performing plasma etching on the layer of second material and the layer of first material to form an etched surface of the layer of first material that is smoother than the surface of the layer of first material, as deposited.