The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Mar. 25, 2020
Asml Netherlands B.v., Veldhoven, NL;
Sander Jeroen Hermanussen, Tilburg, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
Hans Butler, Best, NL;
Bas Jansen, Den Bosch, NL;
Michael Marinus Anna Steur, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.