The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Apr. 01, 2021
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Sherman Seelinger, San Jose, CA (US);
Lauren Wilson, San Jose, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F25D 3/10 (2006.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
F25D 3/105 (2013.01); H05G 2/008 (2013.01);
Abstract
A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.