The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
Jun. 02, 2022
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Eric Eva, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G02B 7/18 (2021.01); B23K 26/0622 (2014.01); B23K 26/55 (2014.01); C03C 14/00 (2006.01); G02B 5/08 (2006.01); G02B 17/06 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/1815 (2013.01); B23K 26/0624 (2015.10); B23K 26/55 (2015.10); C03C 14/004 (2013.01); G02B 5/085 (2013.01); G02B 5/0891 (2013.01); G02B 17/0663 (2013.01); G03F 7/70316 (2013.01); G03F 7/70891 (2013.01); G03F 7/70958 (2013.01); B23K 2103/54 (2018.08); C03C 2214/04 (2013.01); C03C 2214/20 (2013.01);
Abstract
An optical element reflects radiation, such as EUV radiation. The optical element includes a substrate with a surface to which a reflective coating is applied. The substrate has at least one channel through which a coolant can flow. The substrate is formed from fused silica, such as titanium-doped fused silica, or a glass ceramic. The channel has a length of at least 10 cm below the surface to which the reflective coating is applied. The cross-sectional area of the channel varies by no more than +/−20% over the length of the channel.