The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
Feb. 28, 2020
Shibaura Institute of Technology, Tokyo, JP;
Toshiba Materials Co., Ltd., Yokohama, JP;
Atsushi Yumoto, Tokyo, JP;
Tomohiro Sugano, Tokyo, JP;
Takashi Hino, Kanagawa, JP;
Tetsuo Inoue, Kanagawa, JP;
Shuichi Saito, Kanagawa, JP;
SHIBAURA INSTITUTE OF TECHNOLOGY, Tokyo, JP;
TOSHIBA MATERIALS CO., LTD., Kanagawa-Ken, JP;
Abstract
A component comprises a film containing yttrium oxide. A cross section of the film has a first portion, a second portion, and a third portion, and the first to third portions are separated from each other by 0.5 mm or more. A Vickers hardness B1 measured in the first portion, a Vickers hardness B2 measured in the second portion, a Vickers hardness B3 measured in the third portion, and an average value A of the Vickers hardnesses B1 to B3 are numbers satisfying 0.8A≤B1≤1.2A, 0.8A≤B2≤1.2A, and 0.8A≤B3≤1.2A.