The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Jun. 24, 2020
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Xiaoming Qiu, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); B05B 17/06 (2006.01); H01L 21/67 (2006.01); B05B 17/00 (2006.01); H01L 21/687 (2006.01); B08B 3/12 (2006.01);
U.S. Cl.
CPC ...
B05B 17/0646 (2013.01); B05B 17/0623 (2013.01); B06B 1/0603 (2013.01); H01L 21/67051 (2013.01); H01L 21/68764 (2013.01); B08B 3/12 (2013.01);
Abstract

An ultrasonic water jet apparatus includes a water accumulation part in which the water supplied from a water supply source is temporarily accumulated, a jet port that jets the water accumulated in the water accumulation part, and a piezoelectric vibration plate including a dome part that is disposed opposed to the jet port in the water accumulation part and propagates the ultrasonic vibration to the water accumulated in the water accumulation part, a flange part that projects outward in the radial direction from a peripheral edge of the dome part, and an annular plate that projects outward in the radial direction from a peripheral edge of the flange part.


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