The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Aug. 24, 2021
Changxin Memory Technologies, Inc., Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
A method for preparing method semiconductor device includes: providing a wafer on which a semiconductor structure is formed; forming a stacked film layer structure on a side of the semiconductor structure away from the wafer, a film layer in the stacked film layer structure farthest from the semiconductor structure being a first film layer; reducing a thickness of the first film layer so that the thickness of the first film layer at where orthographic projection of the first film layer on the wafer locates at an edge of the wafer is less than the thickness of the first film layer at where orthographic projection of the first film layer on the wafer locates in middle of the wafer; and patterning the stacked film layer structure to form through holes which communicate to the semiconductor structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile