The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Apr. 23, 2021
Applicant:
Carl Zeiss X-ray Microscopy, Inc., Dublin, CA (US);
Inventors:
Claus Flachenecker, Hayward, CA (US);
Thomas A. Case, Walnut Creek, CA (US);
Assignee:
Carl Zeiss X-ray Microscopy, Inc., Dublin, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/02 (2006.01); H01J 35/14 (2006.01); H05G 1/06 (2006.01); H01J 35/16 (2006.01);
U.S. Cl.
CPC ...
H05G 1/025 (2013.01); H01J 35/153 (2019.05); H01J 35/16 (2013.01); H05G 1/06 (2013.01);
Abstract
The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.