The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Dec. 14, 2020
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Shunsuke Okada, Suzuka, JP;

Tomonori Aoyama, Yokkaichi, JP;

Tatsunori Isogai, Yokkaichi, JP;

Masaki Noguchi, Yokkaichi, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 21/28 (2006.01); H01L 29/51 (2006.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 29/4234 (2013.01); H01L 29/40117 (2019.08); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H10B 43/27 (2023.02);
Abstract

A semiconductor storage device relating to one embodiment includes: a stacked body in which electrode films and insulating films are alternately stacked in a first direction; a first and a second charge storage films that are arranged away from each other in the first direction inside the stacked body and each face one of the electrode films; and a tunnel insulating film that extends in the first direction inside the stacked body and is in contact with the first and the second charge storage films. The first and the second charge storage films each include a first film that is in contact with the electrode film and contains a High-k material, and a second film that is provided between the first film and the tunnel insulating film and contains silicon nitride.


Find Patent Forward Citations

Okada, Shunsuke. (2024). Semiconductor storage device (U.S. Patent No. 11862696). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11862696

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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