The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Feb. 03, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Bharath Ram Sundar, Chennai, IN;
Raman K. Nurani, Chennai, IN;
Utkarsha Avinash Dhanwate, Amravati, IN;
Ramakrishnan S. Hariharan, Trichy, IN;
Suresh Bharatharajan Kudallur, Chennai, IN;
Vishwath Ram Amarnath, Chennai, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit a film stack on a surface of a substrate, wherein the film stack comprises a plurality of layers of a first material and a plurality of layers of a second material. The method further includes obtaining metrology data associated with the film stack. The method further includes training a first machine-learning model based on the sensor data and the metrology data, wherein the first machine-learning model is trained to generate predictive metrology data associated with layers of the first material. The method further includes training a second machine-learning model based on the sensor data and the metrology data, wherein the second machine-learning model is trained to generate predictive metrology data associated with layers of the second material.