The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Sep. 08, 2021
Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventor:

Wei Feng, Hefei, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); G01S 17/08 (2006.01); G01S 7/4861 (2020.01); B66C 13/46 (2006.01); B66C 13/18 (2006.01); B66C 19/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); B66C 13/46 (2013.01); G01S 7/4861 (2013.01); G01S 17/08 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); B66C 13/18 (2013.01); B66C 19/00 (2013.01);
Abstract

A crane monitoring system includes a first detection apparatus, a processing apparatus and a second detection apparatus. The first detection apparatus is configured to detect a position of a crane, to send a first detection signal when the crane is located above a Front Opening Unified Pod (FOUP) load port of a semiconductor processing device, and to send a second detection signal when the crane leaves a space above the FOUP load port. The processing apparatus is configured to generate a start control signal responsive to receiving the first detection signal, and to generate a stop control signal responsive to receiving the second detection signal. The second detection apparatus is configured to start a detection of whether there is a foreign matter between the crane and the FOUP load port after receiving the start control signal, and to stop the detection after receiving the stop control signal.


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