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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11862491 B1

PDFFull Text
Date of Patent:
Jan. 02, 2024

Filed:

Jul. 10, 2020

Apparatus and method for treating substrate

Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Dohyeon Yoon, Cheonan-si, KR;

Joo Jib Park, Asan-si, KR;

Jin Se Park, Incheon, KR;

Assignee:

Semes Co., Ltd., Chungcheongnam-do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

David G Cormier

Assistant Examiner:

Thomas Bucci

Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 7/00 (2006.01); H01L 21/02 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); B08B 7/0021 (2013.01); H01L 21/02101 (2013.01); H01L 21/67034 (2013.01); H01L 21/67742 (2013.01);
Abstract

An apparatus for treating a substrate includes a light treatment chamber having an interior space, a support unit that supports the substrate in the interior space, and an irradiation unit that irradiates light to the substrate in the interior space to remove organic matter remaining on the substrate, in which the irradiation unit includes a first light source that irradiates first light to the substrate and a second light source that irradiates, to the substrate, second light having a different wavelength range from the first light.

Find Patent Forward Citations

Yoon, Dohyeon. (2024). Apparatus and method for treating substrate (U.S. Patent No. 11862491). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11862491

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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