The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Jun. 18, 2020
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Ali Afzali-Ardakani, Ossining, NY (US);
David L. Rath, Stormville, NY (US);
Sarunya Bangsaruntip, Mount Kisco, NY (US);
George Gabriel Totir, Newtown, CT (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/18 (2006.01); B05D 1/02 (2006.01); B05D 1/00 (2006.01); B05D 3/00 (2006.01); B05D 3/10 (2006.01); B05D 3/14 (2006.01); B05D 3/06 (2006.01);
U.S. Cl.
CPC ...
B05D 1/18 (2013.01); B05D 1/005 (2013.01); B05D 1/02 (2013.01); B05D 3/005 (2013.01); B05D 3/062 (2013.01); B05D 3/102 (2013.01); B05D 3/142 (2013.01); B05D 2202/00 (2013.01); B05D 2518/00 (2013.01);
Abstract
Techniques regarding methods and/or apparatuses for protecting metal substrates during one or more lithography processes are provided. For example, one or more embodiments described herein can comprise a method that can include coating a metal substrate with a polymer film that self-assembles on a metal oxide positioned on a surface of the metal substrate. The method can also include covalently bonding the polymer film to the metal oxide.