The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Apr. 15, 2020
Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

Andrew B. Cowe, Andover, MA (US);

Gordon Hill, Arlington, MA (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 3/02 (2006.01); H01L 21/67 (2006.01); F16K 3/16 (2006.01); C23C 16/44 (2006.01); B08B 5/00 (2006.01); H01J 37/32 (2006.01); F16K 3/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B08B 5/00 (2013.01); C23C 16/4405 (2013.01); F16K 3/0227 (2013.01); F16K 3/16 (2013.01); F16K 3/18 (2013.01); H01J 37/32357 (2013.01); H01J 2237/335 (2013.01);
Abstract

An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.


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