The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Jun. 03, 2021
Applicant:
Korea Research Institute of Standards and Science, Daejeon, KR;
Inventors:
Kyung Joong Kim, Daejeon, KR;
Gyea Young Kwak, Daejeon, KR;
Taegun Kim, Cheongju-si, KR;
Hyungung Yu, Daejeon, KR;
Seung Mi Lee, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/27 (2006.01); G01Q 40/02 (2010.01); B82Y 35/00 (2011.01); G01Q 60/24 (2010.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01N 21/274 (2013.01); G01Q 40/02 (2013.01); B82Y 35/00 (2013.01); G01Q 60/24 (2013.01); H01J 37/28 (2013.01);
Abstract
Provided is a method of calibrating a nano measurement scale using a standard material including: measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope; determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion; and calibrating a measurement scale of the microscope based on the certified values and the measured values.