The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Sep. 23, 2019
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Takehiro Shindo, Nirasaki, JP;

Toshiaki Kodama, Nirasaki, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); B25J 18/04 (2006.01); B25J 9/12 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01); B25J 9/10 (2006.01); B25J 9/00 (2006.01); B25J 13/08 (2006.01);
U.S. Cl.
CPC ...
B25J 9/042 (2013.01); B25J 9/126 (2013.01); B25J 18/04 (2013.01); H01L 21/67196 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); B25J 9/0021 (2013.01); B25J 9/102 (2013.01); B25J 11/0095 (2013.01); B25J 13/088 (2013.01);
Abstract

There is provided a transport apparatus including: an articulated arm including: a first arm in which a drive motor is installed; a second arm configured to be driven by the first arm; a transmission portion configured to convert a rotation of the drive motor into a rotation of the second arm via a joint; a first detector configured to detect a first sensor value corresponding to a rotation angle of an input shaft of the transmission portion; and a second detector configured to detect a second sensor value corresponding to a rotation angle of the second arm; and a controller configured to control the articulated arm, wherein the controller is further configured to control the second arm to a target rotation angle based on the first sensor value and the second sensor value.


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