The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Nov. 07, 2022
Asml Netherlands B.v., Veldhoven, NL;
Giovanna De Simone, Eindhoven, NL;
Marco Adrianus Peter Van Den Heuvel, Waalre, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Niek Jacobus Johannes Roset, Eindhoven, NL;
Justin Johannes Hermanus Gerritzen, Veldhoven, NL;
ASML NETHERLAND B.V., Veldhoven, NL;
Abstract
A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.