The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Oct. 14, 2021
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Keiji Nomaru, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/0622 (2014.01); B23K 26/70 (2014.01); H01S 5/34 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0622 (2015.10); B23K 26/702 (2015.10); H01S 5/3401 (2013.01);
Abstract
A laser beam irradiation unit of a laser processing apparatus includes a first pulsed laser oscillator that oscillates a pulsed laser having a wavelength of 9 to 11 μm and a pulse width of 5 ns or less, a COamplifier that amplifies a pulsed laser beam emitted from the first pulsed laser oscillator, and a condenser that focuses the pulsed laser beam amplified by the COamplifier on a workpiece held on the chuck table.