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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11837434 B1

PDFFull Text
Date of Patent:
Dec. 05, 2023

Filed:

Sep. 30, 2019

Setting position of a particle beam device component

Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Andreas Schmaunz, Oberkochen, DE;

Gero Walter, Westhausen, DE;

Bernd Stenke, Illertissen, DE;

Assignee:

Carl Zeiss Microscopy GmbH, Jena, DE;

Attorney:

Muirhead and Saturnelli, LLC

Primary Examiner:

Georgia Y Epps

Assistant Examiner:

Michael P Maskell

Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/10 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/10 (2013.01); H01J 37/265 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/24585 (2013.01);
Abstract

A method for setting position of a component of a particle beam apparatus may be performed, for example, by the particle beam apparatus. The component may be embodied as a gas feed device, as a particle detector and/or as a beam detector. The method may include: aligning the component with a coincidence point of a particle beam of the particle beam apparatus, determining a rotation angle of a rotation of an object carrier about a rotation axis, loading a position of the component associated with the rotation angle from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component, and moving the component into the position loaded from the database by means of the drive unit, wherein the component arranged in the loaded position is at a pre-definable distance from the object.

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Schmaunz, Andreas. (2023). Setting position of a particle beam device component (U.S. Patent No. 11837434). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11837434

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