The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Jun. 18, 2020
Asml Netherlands B.v., Veldhoven, NL;
Güneş Nak{dot over (i)}boğlu, Eindhoven, NL;
Nicholas Peter Waterson, Veldhoven, NL;
Remco Van De Meerendonk, 's-Hertogenbosch, NL;
Steve Gregory Brust, Eindhoven, NL;
Dirk Martinus Gerardus Petrus Wilhelmus Jakobs, Vortum-Mullem, NL;
Shravan Kottapalli, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.