The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Dec. 04, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/00 (2019.01); G02B 26/10 (2006.01); G05D 1/02 (2020.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); G02B 26/0833 (2013.01); G05D 1/0251 (2013.01);
Abstract
An optical scanning apparatus includes a MEMS substrate, a substrate fixing section to which the MEMS substrate is fixed, and an environment detection sensor that detects an environment factor associated with the mirror. The environment detection sensor is disposed in a position where the environment detection sensor overlaps with or is adjacent to the substrate fixing section but does not overlap with the MEMS substrate in a plan view viewed in a direction perpendicular to a surface of the MEMS substrate.