The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Jan. 14, 2022
Method for calculating position or angle of inspection target, storage medium, apparatus, and system
Canon Kabushiki Kaisha, Tokyo, JP;
Satoshi Kubo, Tochigi, JP;
Takumi Kawamata, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A method for calculating a position or an angle of an inspection target based on a sine wave signal and a cosine wave signal output from an encoder or a laser interferometer, includes acquiring a temporary movement speed of the inspection target, calculating an amplitude correction value corresponding to the temporary movement speed using information representing a relationship between a movement speed of the inspection target and amplitudes of the sine wave signal and the cosine wave signal acquired in advance, correcting the amplitudes of the sine wave signal and the cosine wave signal using the amplitude correction value, and calculating an offset error in a Lissajous waveform using the sine wave signal and the cosine wave signal the amplitudes of which are corrected with the amplitude correction value and calculating the position or the angle of the inspection target using the offset error.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile