The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Nov. 15, 2018
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Derk Ten Hoopen, Zevenaar, NL;
Francois-Xavier Debiesme, Eindhoven, NL;
Eric Pierre-Yves Vennat, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); F16F 9/30 (2006.01); F16F 9/32 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
F16F 9/306 (2013.01); F16F 9/3207 (2013.01); G03F 7/70808 (2013.01);
Abstract
The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.