The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2023

Filed:

Mar. 26, 2021
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Fang-Pin Chiang, Taichung, TW;

Chi-Tung Lai, Hsinchu, TW;

Heng-Yi Tseng, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B67D 7/16 (2010.01); G01F 23/00 (2022.01); B67D 7/14 (2010.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B67D 7/16 (2013.01); B67D 7/145 (2013.01); H01L 21/67017 (2013.01);
Abstract

A liquid supply system is provided. The liquid supply system includes a liquid tank configured to store a liquid. The liquid supply system also includes a liquid measurement module positioned outside the liquid tank and fluidly connected two connecting ports that are located at opposite sides of a surface of the liquid stored in the liquid tank. The liquid tank includes a tube extends parallel to a height direction of the liquid tank. The liquid tank also includes a floating member located in the tube and configured to float on the liquid. The liquid tank further includes a detection member configured to emit a detection signal toward the floating member.


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