The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2023

Filed:

Dec. 03, 2019
Applicant:

Dalian University of Technology, Dalian, CN;

Inventors:

Huolin Huang, Dalian, CN;

Hui Zhang, Dalian, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/07 (2006.01); G01R 33/02 (2006.01); H10B 61/00 (2023.01); H10N 52/01 (2023.01); H10N 52/80 (2023.01); H10N 52/00 (2023.01);
U.S. Cl.
CPC ...
G01R 33/072 (2013.01); G01R 33/0206 (2013.01); G01R 33/077 (2013.01); H10B 61/20 (2023.02); H10N 52/01 (2023.02); H10N 52/101 (2023.02); H10N 52/80 (2023.02);
Abstract

A high-temperature three-dimensional Hall sensor with a real-time working temperature monitoring function includes a buffer layer, an epitaxial layer, and a barrier layer sequentially grown on a substrate. A high-density two-dimensional electron gas is induced by polarization charges in a potential well at an interface of heterojunctions of the epitaxial layer. A lower surface of the substrate includes a vertical Hall sensor for sensing a magnetic field parallel to a surface of a device. An upper surface of the barrier layer includes a 'cross' horizontal Hall sensor for sensing a magnetic field perpendicular to the surface of the device.


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