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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11826713 B1

PDFFull Text
Date of Patent:
Nov. 28, 2023

Filed:

Aug. 28, 2020

Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein

Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

Ulrich Alfred Brammer, Berlin, DE;

Johannes Seiwert, Berlin, DE;

Christiane Le Tiec, Berlin, DE;

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:

Cesari and McKenna, LLP

Primary Examiner:

Charles S Bushey

Int. Cl.
CPC ...
B01F 3/04 (2006.01); B01F 23/00 (2022.01); G05D 11/13 (2006.01); B01F 23/10 (2022.01); B01F 23/20 (2022.01); B01F 23/232 (2022.01); B01F 25/31 (2022.01); B01F 25/42 (2022.01); B01F 35/21 (2022.01); B01F 35/22 (2022.01); B01F 35/221 (2022.01); C11D 7/04 (2006.01); B01F 23/237 (2022.01); B01F 101/48 (2022.01); B01F 101/58 (2022.01); B01F 101/00 (2022.01); B08B 3/08 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B01F 23/09 (2022.01); B01F 23/19 (2022.01); B01F 23/2322 (2022.01); B01F 23/29 (2022.01); B01F 25/31 (2022.01); B01F 25/42 (2022.01); B01F 35/2112 (2022.01); B01F 35/2113 (2022.01); B01F 35/2115 (2022.01); B01F 35/2132 (2022.01); B01F 35/21112 (2022.01); B01F 35/2202 (2022.01); B01F 35/2211 (2022.01); B01F 35/2213 (2022.01); B01F 35/2217 (2022.01); C11D 7/04 (2013.01); G05D 11/131 (2013.01); B01F 23/2376 (2022.01); B01F 2101/4505 (2022.01); B01F 2101/48 (2022.01); B01F 2101/58 (2022.01); B08B 3/08 (2013.01); H01L 21/6704 (2013.01);
Abstract

Systems and methods are described for dissolving ammonia gas in deionized water. The system includes a deionized water source and a gas mixing device including a first inlet for receiving ammonia gas, a second inlet for receiving a transfer gas, and a mixed gas outlet for outputting a gas mixture including the ammonia gas and the transfer gas. The system includes a contactor that receives the deionized water and the gas mixture and generates deionized water having ammonia gas dissolved therein. The system includes a sensor in fluid communication with at least one inlet of the contactor for measuring a flow rate of the deionized water, and a controller in communication with the sensor. The controller sets a flow rate of the ammonia gas based on the flow rate of the deionized water measured by the sensor, and a predetermined conductivity set point.

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