The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
May. 28, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Chwen Yu, Taipei, TW;
En Tian Lin, Hsinchu, TW;
Chih-Chiang Tseng, Xinfeng Township, TW;
Tzu-Sou Chuang, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 67/00 (2006.01); H01L 21/67 (2006.01); B01D 63/08 (2006.01); B01D 69/06 (2006.01); B01D 69/02 (2006.01);
U.S. Cl.
CPC ...
B01D 67/0034 (2013.01); B01D 63/08 (2013.01); B01D 67/0037 (2013.01); B01D 67/0088 (2013.01); B01D 69/02 (2013.01); B01D 69/06 (2013.01); H01L 21/67017 (2013.01); B01D 2323/34 (2013.01); B01D 2325/02 (2013.01); B01D 2325/04 (2013.01);
Abstract
A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane and a plurality of through holes.