The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2023

Filed:

Aug. 09, 2022
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Tsung-Sheng Kuo, Hsin-Chu, TW;

Chih-Hung Huang, Hsin-Chu, TW;

Yi-Fam Shiu, Hsin-Chu, TW;

Chueng-Jen Wang, Hsin-Chu, TW;

Hsuan Lee, Tainan, TW;

Jiun-Rong Pai, Jhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 47/36 (2006.01); B65G 15/28 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 21/66 (2006.01); B65G 47/86 (2006.01);
U.S. Cl.
CPC ...
B65G 47/842 (2013.01); B65G 15/28 (2013.01); H01L 21/67271 (2013.01); H01L 21/67294 (2013.01); H01L 21/67706 (2013.01); H01L 21/67736 (2013.01); H01L 21/6838 (2013.01); H01L 22/34 (2013.01);
Abstract

In certain embodiments, a system includes: a source lane configured to move a first die container between a load port and a source lane staging area; an inspection sensor configured to produce a sensor result based on a die on the first die container; a pass target lane configured to move a second die container between a pass target lane out port and a pass target lane staging area; a fail target lane configured to move a third die container between a fail target lane out port and a fail target lane staging area; and a conveyor configured to move the die from the first die container at the source lane staging area to either the second die container at the pass target lane staging area or the fail target lane staging area based on the sensor result.


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