The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Mar. 02, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Phillip Alfred Criminale, Liberty Hill, TX (US);
Zhiqiang Guo, San Jose, CA (US);
Andrew S. C. Ho, Liberty Hill, TX (US);
Rachel Sara Stolzman, Saratoga, CA (US);
Michael Carl Hankes, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An enclosure system includes multiple walls forming an interior volume. The enclosure system is configured to couple to an equipment front end module (EFEM) of a substrate processing system. The enclosure system further includes a charging assembly including a first charging coil. The enclosure system further includes one or more first support structures disposed within the interior volume under the first charging coil. The one or more first support structures are configured to support a first validation wafer within a threshold distance of the first charging coil to charge the first validation wafer via the charging assembly.