The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Mar. 25, 2022
Toyota Motor Engineering & Manufacturing North America, Inc., Plano, TX (US);
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Shailesh N. Joshi, Ann Arbor, MI (US);
Gaurav Singhal, Champaign, IL (US);
Paul Vannest Braun, Champaign, IL (US);
Kai-Wei Lan, Champaign, IL (US);
Nenad Miljkovic, Urbana, IL (US);
Toyota Motor Engineering & Manufacturing North America, Inc., Plano, TX (US);
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Abstract
A component with a reflective substrate, a photoresist layer disposed on the reflective substrate, and a light diffusing layer sandwiched between the reflective substrate and the photoresist layer is provided. The light diffusing layer includes an outer metal oxide layer with an outer rough surface configured to diffuse laser light during laser interference lithography of the photoresist layer. The outer metal oxide is also configured to be reduced to a conductive metallic layer during electroplating of the substrate. The outer metal oxide layer includes a plurality of elongated light diffusing elements extending in an outward direction from the substrate such that the outer rough surface diffuses at least 90% of laser light during the laser interference lithography of the photoresist layer.