The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Dec. 19, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Sietse Thijmen Van Der Post, Utrecht, NL;
Peter Danny Van Voorst, Nijmegen, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 9/00 (2006.01); G01N 23/207 (2018.01); G02B 3/00 (2006.01); G02B 5/18 (2006.01); G03F 7/00 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G01J 9/00 (2013.01); G01N 23/207 (2013.01); G02B 3/0037 (2013.01); G02B 5/1819 (2013.01); G02B 5/1838 (2013.01); G03F 7/70616 (2013.01); G21K 1/065 (2013.01); G01J 2009/002 (2013.01);
Abstract
Disclosed is a wavefront sensor for measuring a tilt of a wavefront at an array of locations across a beam of radiation, wherein said wavefront sensor comprises a film, for example of Zirconium, having an indent array comprising an indent at each of said array of locations, such that each indent of the indent array is operable to perform focusing of said radiation. Also disclosed is a radiation source and inspection apparatus comprising such a wavefront sensor.