The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Sep. 30, 2021
Applicant:
Showa Denko Materials Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
RESONAC CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/304 (2006.01); H01L 21/3065 (2006.01); C08K 3/20 (2006.01); C08K 5/09 (2006.01); C08K 5/17 (2006.01); C08L 71/02 (2006.01); H01L 21/3105 (2006.01); C09K 13/00 (2006.01); H01L 21/306 (2006.01); C08K 3/22 (2006.01); C03C 15/02 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C08K 3/20 (2013.01); C08K 5/09 (2013.01); C08K 5/17 (2013.01); C08L 71/02 (2013.01); C09K 13/00 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31053 (2013.01); C03C 15/02 (2013.01); C08K 2003/2213 (2013.01);
Abstract
A polishing liquid containing abrasive grains, a hydroxy acid, a polyol, a cationic compound, and a liquid medium, in which a zeta potential of the abrasive grains is positive and a weight average molecular weight of the cationic compound is less than 1000.