The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
Sep. 14, 2021
Applicants:
Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;
Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;
Inventors:
Huan Yun Zhang, Shanghai, CN;
Jian Wu, Shanghai, CN;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/308 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01); H01L 29/10 (2006.01); H01L 29/08 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0673 (2013.01); H01L 21/0217 (2013.01); H01L 21/02236 (2013.01); H01L 21/02532 (2013.01); H01L 21/308 (2013.01); H01L 21/823412 (2013.01); H01L 21/823418 (2013.01); H01L 21/823431 (2013.01); H01L 27/0886 (2013.01); H01L 29/0847 (2013.01); H01L 29/1033 (2013.01); H01L 29/42392 (2013.01); H01L 29/6656 (2013.01); H01L 29/66545 (2013.01); H01L 29/7843 (2013.01); H01L 29/6659 (2013.01);
Abstract
A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate having a first region and a second region; first nanowires formed over the first region of the semiconductor substrate; second nanowires with a diameter smaller than a diameter of the first nanowires formed over the second region of the semiconductor substrate; a first gate layer formed around the first nanowires; and a second gate layer formed around the second nanowires.