The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2023

Filed:

Feb. 24, 2017
Applicant:

Shin-etsu Handotai Co., Ltd., Tokyo, JP;

Inventor:

Yoshihiro Usami, Nishigo-mura, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 27/06 (2006.01); H01L 21/304 (2006.01); B28D 5/04 (2006.01); B24B 5/36 (2006.01); B24B 5/37 (2006.01); B65H 54/28 (2006.01); B65H 59/10 (2006.01);
U.S. Cl.
CPC ...
B24B 27/0633 (2013.01); B24B 5/363 (2013.01); B24B 5/37 (2013.01); B24B 27/06 (2013.01); B28D 5/04 (2013.01); B28D 5/045 (2013.01); H01L 21/304 (2013.01); B65H 54/28 (2013.01); B65H 59/10 (2013.01); B65H 2701/36 (2013.01);
Abstract

A method for manufacturing a wire saw apparatus including a wire supply reel; a long roller; wire guides; a wire winding reel; and a tension arm controlled to move within a control angle of ±A (°) set in advance and configured to apply tension to the wire, the method including the steps of: measuring a surface roughness Rmax of the long roller; measuring an angle a (°) of the tension arm at which the tension arm swings outside a range of the control angle set in advance while the wire is extending from the wire supply reel; calculating R×2×A÷(|a|+A)=R, where R(μm) represents the measured surface roughness Rmax of the long roller; and adjusting the surface roughness Rmax of the long roller to the calculated numerical value Ror less. The method for manufacturing a wire saw apparatus can prevent the tension arm from greatly swinging outside the control range.


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