The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2023
Filed:
Apr. 19, 2018
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/187 (2006.01); H01L 41/29 (2013.01); H01L 41/316 (2013.01); H10N 30/87 (2023.01); H10N 30/06 (2023.01); H10N 30/076 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H10N 30/878 (2023.02); H10N 30/06 (2023.02); H10N 30/076 (2023.02); H10N 30/8542 (2023.02);
Abstract
There is provided a laminated substrate having a piezoelectric film, including: a substrate; a first electrode film provided on the substrate; and a piezoelectric film provided on the first electrode film, wherein an oxide film containing an oxide represented by a composition formula of RuOor IrO, is provided on the piezoelectric film.