The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2023

Filed:

Nov. 10, 2021
Applicant:

Korea Advanced Institute of Science and Technology, Daejeon, KR;

Inventors:

Sanghyeon Kim, Daejeon, KR;

DaeMyeong Geum, Daejeon, KR;

SeungYeop Ahn, Daejeon, KR;

Jinha Lim, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0352 (2006.01); H01L 31/0232 (2014.01); H01L 31/18 (2006.01); H01L 49/02 (2006.01); H01L 27/144 (2006.01);
U.S. Cl.
CPC ...
H01L 31/035236 (2013.01); H01L 27/1443 (2013.01); H01L 28/40 (2013.01); H01L 31/0232 (2013.01); H01L 31/186 (2013.01);
Abstract

Various embodiments relate to a superlattice photodetector and a method of manufacturing the same. The superlattice photodetector includes an absorption layer for absorbing incident light and a waveguide layer coupled with the absorption layer and enabling the incident light to be waveguided within the absorption layer. The waveguide layer may include a periodic structure in which a plurality of metal patterns and a plurality of dielectric patterns are repeatedly arranged. According to various embodiments, the superlattice photodetector can be thinned while having improved performance.


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