The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2023
Filed:
Nov. 11, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Toshiyuki Shiokawa, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/416 (2006.01); G01N 27/38 (2006.01);
U.S. Cl.
CPC ...
G01N 27/38 (2013.01); G01N 27/416 (2013.01); G01N 27/4167 (2013.01);
Abstract
A pH measuring device configured to measure a pH of a target liquid includes a main body block including a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line. The main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.