The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2023

Filed:

Dec. 08, 2020
Applicant:

Nova Ltd., Rehovot, IL;

Inventors:

Yonatan Oren, Kiryat Ono, IL;

Gilad Barak, Rehovot, IL;

Assignee:

NOVA LTD., Rehovot, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/25 (2006.01); G01N 21/17 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1717 (2013.01); G01N 21/25 (2013.01); G01N 2021/1725 (2013.01);
Abstract

Photoreflectance (PR) spectroscopy system and method for accumulating separately a 'pump on' light beam and a 'pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on' light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.


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