The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Mar. 10, 2020
Asml Netherlands B.v., Veldhoven, NL;
Bas Jansen, Den Bosch, NL;
Samer Abdelmoeti Abuzeid Abdelmoeti, Eindhoven, NL;
Hans Butler, Best, NL;
Koen Johan Frederik Loonen, 's-Hertogenbosch, NL;
Aditya Singh, Eindhoven, NL;
Ruben Etienne Johan Rinus Vandervelden, Oostham, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention relates to an object positioning system including an actuator system and a measurement system. The actuator system includes an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field includes a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of the actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system includes a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.