The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2023

Filed:

Dec. 11, 2020
Applicant:

Rigaku Corporation, Akishima, JP;

Inventors:

Shintaro Kobayashi, Akishima, JP;

Katsuhiko Inaba, Akishima, JP;

Hisashi Konaka, Akishima, JP;

Assignee:

RIGAKU CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/20016 (2018.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/20016 (2013.01); G01N 23/207 (2013.01); G01N 2223/056 (2013.01); G01N 2223/303 (2013.01); G01N 2223/61 (2013.01);
Abstract

There is provided a control apparatusthat controls a tilt of a sample, the control apparatus comprising an input sectionthat receives an input of inclination information representing inclination of the sample with respect to a ϕ axis; an adjustment amount determination sectionthat determines adjustment amounts of a ω value and a χ value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ϕ value that varies, using the inclination information; and a drive instruction sectionthat drives a goniometer according to ϕ axis rotation of the sample, based on the determined adjustment amounts of the ω value and the χ value, during an X-ray diffraction measurement.


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