The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Feb. 17, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Shigeru Kasai, Yamanashi, JP;
Yutaka Akaike, Yamanashi, JP;
Yoshiyasu Kato, Yamanashi, JP;
Hiroyuki Nakayama, Yamanashi, JP;
Hiroaki Komiya, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B32B 7/12 (2006.01); B32B 15/01 (2006.01); H05B 3/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); B32B 7/12 (2013.01); B32B 15/016 (2013.01); H05B 3/20 (2013.01); B32B 2255/06 (2013.01); B32B 2255/20 (2013.01); H05B 2203/005 (2013.01);
Abstract
A dummy wafer includes a planar heater and a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.