The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Dec. 03, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Shigeru Kasai, Yamanashi, JP;
Fumiya Fujii, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G05D 23/19 (2006.01); H03F 3/217 (2006.01); H03M 3/00 (2006.01); H05B 1/02 (2006.01); H03K 3/017 (2006.01); H03K 4/06 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2849 (2013.01); G01R 31/2831 (2013.01); G05D 23/1902 (2013.01); G05D 23/1913 (2013.01); G05D 23/1917 (2013.01); H03F 3/217 (2013.01); H03M 3/50 (2013.01); H05B 1/0233 (2013.01); H03F 2200/171 (2013.01); H03K 3/017 (2013.01); H03K 4/06 (2013.01);
Abstract
A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. The power supply includes a switching amplifier configured to amplify the input signal from the input device and output the amplified signal.