The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Jul. 14, 2022
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Takahiro Eto, Kawasaki, JP;
Lihong Liu, Hillsboro, OR (US);
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A semiconductor processing liquid including hydrofluoric acid, and an organic solvent, in which the organic solvent contains a compound represented by the formula below in which Xis a single bond or an alkylene group having 1 to 6 carbon atoms, in which an ether bond may be interposed, Yis one of —O—, —(C═O)—, —O—(C═O)—, and —(C═O)—O—, Yis one of —(C═O)—, —O—(C═O)—, and —(C═O)—O—, and Yand Yare each independently a single bond or an alkylene group having 1 to 6 carbon atoms in which an ether bond may be interposed, provided that, X, Y, and Ydo not contain hydroxyl groups in structures thereof, and when Xis a single bond, Yis not —O—)HC—Y—Y—X—Y—Y—CH  (1).