The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
May. 27, 2021
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Naoya Inoue, Joetsu, JP;
Satoshi Watanabe, Joetsu, JP;
Ryosuke Taniguchi, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 381/12 (2006.01); G03F 7/004 (2006.01); C08F 212/14 (2006.01); C07C 25/18 (2006.01); C07C 33/46 (2006.01); C07C 309/42 (2006.01); C07D 327/08 (2006.01); C07D 333/76 (2006.01); G03F 7/038 (2006.01);
U.S. Cl.
CPC ...
C07C 381/12 (2013.01); C07C 25/18 (2013.01); C07C 33/46 (2013.01); C07C 309/42 (2013.01); C07D 327/08 (2013.01); C07D 333/76 (2013.01); C08F 212/24 (2020.02); G03F 7/0045 (2013.01); G03F 7/0382 (2013.01); C07C 2601/08 (2017.05); C07C 2603/74 (2017.05);
Abstract
An onium salt containing an anion having formula (A1) and a cation having formula (A1-a), (A1-b) or (A1-c) is provided. A chemically amplified negative resist composition comprising the onium salt as acid generator forms a pattern of good profile having a high sensitivity, improved dissolution contrast, reduced LWR and improved CDU.